wouldn't you rather see ads that at least somewhat match your interests

No, that means they're tracking me.

if they use a technique that moves some of the attribution logic that used to run on third-party servers to instead be done in your web browser?

The more of my data that stays on my system, the better. I'm not against ads or necessarily relevant ads, I'm against tracking.

Wouldn't you want to use a system that involves less tracking?

Yes. I'm willing to disable my ad blocker if they don't track me. If the browser places the ads and the only data that leaves my machine is deanonymized and can't reasonably be used to identify me, that's enough.

However, I'd much prefer to just pay whatever the revenue from the ads I see is. Unfortunately, most services are either $5-10/month to remove ads, and there's no way they make that much from me (it's probably <$1/month, if not per year). I wish Firefox would do something like GNU Taler where I can load up a fund and websites take a faction of a cent for each page view or something.